Albert Hb Cheng, Age 682213 Primrose Dr, Richardson, TX 75082

6709974, Mar 23, 2004

Dec 19, 2002

10/322763

David Permana - Dallas TX
Albert Cheng - Richardson TX
Jeff A. West - Dallas TX
Brock W. Fairchild - Allen TX
Scott A. Johannesmeyer - Richardson TX
Chris M. Bowles - Plano TX
Thomas D. Bonifield - Dallas TX
Rajesh Tiwari - Plano TX

Texas Instruments Incorporated - Dallas TX

H01L 214763

438633, 438637, 438687

A method of preventing seam defects on narrow, isolated lines of 0. 3 micron or less during CMP process is provided. The solution is to change the size of features of dummy metal structures on the same layer as the metal layer to have a width that is about 0. 6 micron or less so that during the electroplating the deposition rate in the features is similar to the narrow, isolated lines. The density, shape, and proximity of the dummy metal structures further prevents the seam defects during CMP processing by preventing Galvanic corrosion.

6635229, Oct 21, 2003

Aug 18, 2000

09/642199

Wei W. Lee - Plano TX
Albert H-B Cheng - Richardson TX
Qizhi He - Plano TX

Texas Instruments Incorporated - Dallas TX

C01B 724

423240R

A method of reducing perfluorocarbon emissions wherein a plasma reactor or thermal chamber is provided and a gaseous single halogen-containing perfluorocarbon is entered into the reactor or thermal chamber. The perfluorocarbon is altered in the plasma reactor or thermal chamber to one of a bromine-containing and/or iodine-containing carbon species and expelled from the reactor or thermal chamber. The alteration includes entering into the plasma reactor or thermal chamber a species taken from the class consisting of iodine, bromine, hydrogen iodide, hydrogen bromide, bromocarbon compound and iodocarbon compounds. When the reactor is a thermal chamber, the temperature in the thermal chamber is at least 800Â C. and the single halogen-containing species is located in the chamber for from about 1 minute to about 3 minutes. When the reactor is a plasma reactor, a plasma is provided in the plasma reactor to dissociate all of the halogen-containing species in the reactor with the dissociated species combining to form more energetically favorable species which are more environmentally friendly.