Andres M Cannavo, Age 58170 22Nd Ave, San Francisco, CA 94121

Andres Cannavo Phones & Addresses

170 22Nd Ave, San Francisco, CA 94121 (415) 876-0301

3015 Octavia St, San Francisco, CA 94123 (415) 409-1537 (415) 674-5636

3017 Octavia St, San Francisco, CA 94123 (415) 474-5784 (415) 563-9448

17011 Tremlett Dr, Clinton Township, MI 48035

Clinton Twp, MI

Sterling Heights, MI

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Us Patents

Modular Frame For A Wafer Fabrication System

US Patent:
2004003, Feb 19, 2004
Filed:
Aug 19, 2002
Appl. No.:
10/223122
Inventors:
Rafael Gomez - Palo Alto CA, US
Abdul Ghafar - Tracy CA, US
Jonathan Borkowski - San Jose CA, US
Kay Coghlan - Santa Cruz CA, US
Andres Cannavo - San Francisco CA, US
Rodney Ow - San Jose CA, US
Assignee:
Brooks-PRI Automation, Inc.
International Classification:
B65G049/07
US Classification:
414/217000
Abstract:
A modular frame assembly for a wafer fabrication system comprising at least one base casting and at least one upstanding pod door opening casting. The at least one base casting and at least one upstanding pod door opening casting are self registering and allow frames for wafer fabrication systems of any normally desired configuration to be produced out or a small number of cast modules. More specifically, in a preferred embodiment, frames configured to mate with one to four commercially available loaders may be readily assembled out of the aluminum castings.

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