Charles E Otis, Age 753111 Old Highway 99 S, Roseburg, OR 97471

2013014, Jun 6, 2013

Dec 6, 2011

13/312704

Anthony Graupera - Hillsboro OR, US
Charles Otis - Hillsboro OR, US

FEI Company - Hillsboro OR

G21K 5/02
H01J 3/14

250282, 250281, 250396 R

An inductively coupled plasma source having multiple gases in the plasma chamber provides multiple ion species to a focusing column. A mass filter allows for selection of a specific ion species and rapid changing from one species to another.

2016009, Mar 31, 2016

Sep 30, 2014

14/502099

- Hillsboro OR, US
Charles Otis - Hillsboro OR, US
N. William Parker - Hillsboro OR, US

FEI Company - Hillsboro OR

H01J 37/32

A chicane blanker assembly for a charged particle beam system includes an entrance and an exit, at least one neutrals blocking structure, a plurality of chicane deflectors, a beam blanking deflector, and a beam blocking structure. The entrance is configured to accept a beam of charged particles propagating along an axis. The at least one neutrals blocking structure intersects the axis. The plurality of chicane deflectors includes a first chicane deflector, a second chicane deflector, a third chicane deflector, and a fourth chicane deflector sequentially arranged in series between the entrance and the exit and configured to deflect the beam along a path that bypasses the neutrals blocking structure and exits the chicane blanker assembly through the exit. In embodiments, the chicane blanker assembly includes a two neutrals blocking structures. In embodiments, the beam blocking structure is arranged between the third chicane deflector and the fourth chicane deflector.

2016002, Jan 28, 2016

Jul 20, 2015

14/804148

- Hillsboro OR, US
Charles Otis - Hillsboro OR, US

FEI Company - Hillsboro OR

H01J 37/05
H01J 37/317
H01J 37/08

An inductively coupled plasma source having multiple gases in the plasma chamber provides multiple ion species to a focusing column. A mass filter allows for selection of a specific ion species and rapid changing from one species to another.

2015012, May 14, 2015

Sep 2, 2014

14/474776

- Hillsboro OR, US
Charles Otis - Hillsboro OR, US

FEI Company - Hillsboro OR

H01J 37/05
H01J 37/08

250282, 250281, 250396 R

An inductively coupled plasma source having multiple gases in the plasma chamber provides multiple ion species to a focusing column. A mass filter allows for selection of a specific ion species and rapid changing from one species to another.

2014011, May 1, 2014

Mar 19, 2013

13/847313

FEI Company - , US
James B. McGinn - Portland OR, US
Charles Otis - Hillsboro OR, US

FEI Company - Hillsboro OR

H01J 37/147

250307, 250397, 250310

A retarding field analyzer uses the existing components of a charged particle beam system eliminating the need for inserting a separate retarding field analyzer device. Using components of the existing column reduces the time required to analyze the beam. Using the imaging capabilities of the existing column facilitates alignment of the beam with the analyzer.