Edwin K Sum, Age 68295 Edinburgh Cir, Danville, CA 94526
Edwin Sum Phones & Addresses
295 Edinburgh Cir, Danville, CA 94526 (925) 838-1828 (925) 876-1828
Fremont, CA
Santa Clara, CA
Pleasanton, CA
295 Edinburgh Cir, Danville, CA 94526
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Position:
Executive, Administrative, and Managerial Occupations
Education
Degree:
Associate degree or higher
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Publications & IP owners
Us Patents
Methods And Apparatus For Reducing Arcing During Plasma Processing
US Patent:
2005026, Dec 1, 2005
Filed:
Jun 1, 2004
Appl. No.:
10/858267
Inventors:
Li Hou - Cupertino CA, US
Qunhua Wang - San Jose CA, US
Edwin Sum - Danville CA, US
John White - Hayward CA, US
Qunhua Wang - San Jose CA, US
Edwin Sum - Danville CA, US
John White - Hayward CA, US
International Classification:
C23C016/00
H01L021/00
H01L021/00
US Classification:
427569000, 118715000
Abstract:
In a first aspect, a method is provided for use during plasma processing. The first method includes the steps of (1) placing a substrate on a substrate holder of a plasma chamber; (2) positioning a cover frame adjacent and below a perimeter of the substrate; and (3) employing the cover frame to reduce arcing during plasma processing within the plasma chamber. Numerous other aspects are provided.
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