Guillermo Garzon resumes & CV records
Resumes
Guillermo Garzon
Location:
Estados Unidos
Guillermo Garzon
Location:
United States
Guillermo A Garzon, Age 48Cedar Hill, TX
Guillermo Garzon Phones & Addresses
Mentions for Guillermo A Garzon
Publications & IP owners
Us Patents
High Stiffness Low Mass Supporting Structure For A Mirror Assembly
US Patent:
2009008, Apr 2, 2009
Filed:
Sep 28, 2007
Appl. No.:
11/864806
Inventors:
Guillermo Garzon - Frisco TX, US
Joseph Caracci - Wading River NY, US
Sharad Mehta - Westborough MA, US
Joseph Caracci - Wading River NY, US
Sharad Mehta - Westborough MA, US
Assignee:
ANORAD CORPORATION - Shirley NY
International Classification:
G02B 7/182
US Classification:
359871
Abstract:
Systems and methods of providing support to a mirror assembly including a high-stiffness, low mass structure. An L-shaped support, in conjunction with a shelf member and a plurality of fingers, provides support to a chuck upon which an operation (such as a wafer inspection) can be carried out. Materials such as ALBEMET and INVAR can be used to reduce mass and increase stiffness to avoid resonance in the system. Sensors and actuators can be employed to sense input energy and adjust the structure, respectively, if resonance is deemed likely.
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