Jason Weldon Weigold, Age 518 Pine St, Plum Island, MA 01950

7449356, Nov 11, 2008

Dec 19, 2006

11/613003

Jason W. Weigold - Somerville MA, US

Analog Devices, Inc. - Norwood MA

H01L 21/00

438 53, 438 52, 438 50, 257419, 381191, 381174

A method of forming a microphone forms a backplate, and a flexible diaphragm on at least a portion of a wet etch removable sacrificial layer. The method adds a wet etch resistant material, where a portion of the wet etch resistant material is positioned between the diaphragm and the backplate to support the diaphragm. Some of the wet etch resistant material is not positioned between the diaphragm and backplate. The method then removes the sacrificial material before removing any of the wet etch resistant material added during the prior noted act of adding. The wet etch resistant material then is removed substantially in its entirety after removing at least part of the sacrificial material.

7633360, Dec 15, 2009

Sep 27, 2006

11/535807

Jason W. Weigold - Somerville MA, US

Analog Devices, Inc. - Norwood MA

H03H 9/24
H03H 9/46
H03H 9/50
H03B 5/30

333186, 333199, 331154, 257415

A MEMS resonator has an outer element having an inner surface, the inner surface defining an area and a inner element coupled to the outer element and disposed within the area. The MEMS resonator also has an actuation electrode, in communication with the outer element, for generating electrostatic signals that cause the inner element to flex in a periodic manner.

7795695, Sep 14, 2010

Sep 27, 2006

11/535804

Jason W. Weigold - Somerville MA, US
John R. Martin - Foxborough MA, US
Timothy J. Brosnihan - Natick MA, US

Analog Devices, Inc. - Norwood MA

H01L 29/84
H04R 25/00

257419, 381175, 181167

A method of forming a microphone having a variable capacitance first deposits high temperature deposition material on a die. The high temperature material ultimately forms structure that contributes to the variable capacitance. The method then forms circuitry on the die after depositing the deposition material. The circuitry is configured to detect the variable capacitance.

7825484, Nov 2, 2010

Apr 25, 2005

11/113925

John R. Martin - Foxborough MA, US
Timothy J. Brosnihan - Natick MA, US
Craig Core - North Andover MA, US
Thomas Kieran Nunan - Carlisle MA, US
Jason Weigold - Somerville MA, US
Xin Zhang - Acton MA, US

Analog Devices, Inc. - Norwood MA

H01L 29/82

257415, 257704, 257419, 257680, 257E21235, 257E31032, 381191, 381175, 381355

A micromachined microphone is formed from a silicon or silicon-on-insulator (SOI) wafer. A fixed sensing electrode for the microphone is formed from a top silicon layer of the wafer. Various polysilicon microphone structures are formed above a front side of the top silicon layer by depositing at least one oxide layer, forming the structures, and then removing a portion of the oxide underlying the structures from a back side of the top silicon layer through trenches formed through the top silicon layer. The trenches allow sound waves to reach the diaphragm from the back side of the top silicon layer. In an SOI wafer, a cavity is formed through a bottom silicon layer and an intermediate oxide layer to expose the trenches for both removing the oxide and allowing the sound waves to reach the diaphragm. An inertial sensor may be formed on the same wafer, with various inertial sensor structures formed at substantially the same time and using substantially the same processes as corresponding microphone structures.

7863069, Jan 4, 2011

Sep 27, 2006

11/535698

Jason W. Weigold - Somerville MA, US

Analog Devices, Inc. - Norwood MA

H01L 21/00

438 50, 438 48, 438 53

A method of producing an integrated MEMS resonator includes providing a substrate including single crystal silicon and partially forming a resonator in a first portion of the substrate, the resonator having a resonating element formed by the substrate and an electrode, the resonating element and the electrode forming a variable capacitor. The method also includes forming circuitry in a second portion of the substrate, the circuitry configured for detecting capacitance of the variable capacitor and finish forming the resonator and integrating the resonator with the circuitry so that the electrode is in communication with the circuitry.

7885423, Feb 8, 2011

Jan 22, 2007

11/625553

Jason W. Weigold - Somerville MA, US

Analog Devices, Inc. - Norwood MA

H04R 25/00

381174, 381175

A microphone includes a diaphragm assembly supported by a substrate. The diaphragm assembly includes at least one carrier, a diaphragm, and at least one spring coupling the diaphragm to the at least one carrier such that the diaphragm is spaced from the at least one carrier. An insulator (or separate insulators) between the substrate and the at least one carrier electrically isolates the diaphragm and the substrate.

7961897, Jun 14, 2011

Jun 28, 2006

11/476378

Jason W. Weigold - Somerville MA, US

Analog Devices, Inc. - Norwood MA

H04R 25/00

381174, 381175, 381369

A microphone is formed to have a diaphragm that is configured to improve signal to noise ratio. To that end, the microphone has a backplate having a hole therethrough, and a diaphragm movably coupled with the backplate. The diaphragm has a bottom surface (facing the backplate) with a convex portion aligned with the hole in the backplate.

8111871, Feb 7, 2012

Jan 17, 2008

12/015903

Xin Zhang - Acton MA, US
Michael W. Judy - Ipswich MA, US
Kieran P. Harney - Andover MA, US
Jason W. Weigold - Somerville MA, US

Analog Devices, Inc. - Norwood MA

H04R 11/02
G01L 9/00

381423, 257419

A microphone has a movable diaphragm having a rest position, a stationary portion, and a set of springs movably coupling the diaphragm and the stationary portion. The diaphragm and stationary portion are spaced a first distance when the diaphragm is in the rest position. When not in the rest position, however, the diaphragm and stationary portion are capable of being spaced a second distance, which is greater than the first distance. Despite the change in distance, the diaphragm still is capable of returning the space from the second distance to the first distance when the diaphragm returns to the rest position.