Jeffrey K. Mendiola - Meridian ID
Willard L. Hofer - Boise ID
Micron Technology, Inc. - Boise ID
An apparatus and method for inverting a plurality of plate-like materials to provide for the treatment of plate-like material using techniques that must be applied to the surface from a direction other than from above the material, such as for beneath the material in meniscus coating techniques. The apparatus includes a base, a back attached to the base, a top that is removably attachable to the base for retaining a cassette between the top and the base and retractable material holders attached to the base for engaging and disengaging the plate-like material. In a preferred embodiment, the retractable material holders are in the form of support blocks having notches corresponding the edges of the plate-like material that are reciprocally moved by a side actuator to enable the blocks to engage and disengage the plate-like material. Also in a preferred embodiment, support block actuators are attached to the blocks to provide for restrained movement of the plate-like material between the surfaces of the cassette rails and top actuators are provided to separate the top from the back of the apparatus. Alternatively, beveled notches in the blocks are used to provide restrained movement of the plate-like material between the surfaces of the cassette rails and an open and close hinge and locking mechanism arrangement is used to connect the top to the back.