Inventors:
David L. Corkum - Attleboro MA
June Park - Providence RI
Keith W. Kawate - Attleboro Falls MA
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
G01P 15125
Abstract:
A first embodiment of a condition responsive capacitive transducer, such as an accelerometer (1), is shown in which an electrically conductive sensor element (14) is sandwiched between upper (10) and lower (12) electrically insulative planar substrates and mounted in sealed, spaced apart relation by patterns (16) of adhesive containing spacing elements. A second embodiment (100) includes a signal conditioning capacitor having plate portions (114r, 120b and 114s, 120c) on either side of a condition responsive capacitor to minimize errors caused by translational movement of the sensor element (114) relative to the substrates (110, 112). Circuit conditioning electronics (124) is shown mounted directly on one of the substrates (110) and the sensor is mountable directly on a circuit board. A third embodiment (200) shows differential capacitors (224, 226, 228, 230, 232, 234) for minimizing errors due to misalignment of the movable element (114) with respect to the fixed supports (210, 212). Another embodiment provides a material system for use in condition responsive capacitive transducers having refractory metal for a sensing element and glass material for a supporting substrate.
