Joseph Hallisey33 Chestnut St #6, Chelsea, MA 02150

Joseph Hallisey Phones & Addresses

33 Chestnut St #6, Chelsea, MA 02150 (617) 889-5937 (617) 884-7543

35 Chestnut St, Chelsea, MA 02150

33 Chestnut St APT 6, Chelsea, MA 02150 (617) 884-7543

Work

Position: Professional/Technical

Education

Degree: Associate degree or higher

Mentions for Joseph Hallisey

Career records & work history

License Records

Joseph F Hallisey

Address:
Chelsea, MA
Licenses:
License #: 454 - Active
Issued Date: Jan 1, 1992
Expiration Date: Jul 31, 2019
Type: Systems Contractor
Organization:
ATE SECURITY SYSTEMS

Joseph F Hallisey

Address:
Chelsea, MA 02150
Licenses:
License #: 822 - Active
Issued Date: Jan 1, 1992
Expiration Date: Jul 31, 2019
Type: Systems Technician

Joseph Hallisey resumes & CV records

Resumes

Joseph Hallisey Photo 12

Joseph Hallisey

Joseph Hallisey Photo 13

Engineering Manager At Tri

Location:
Greater Boston Area
Industry:
Semiconductors
Joseph Hallisey Photo 14

Owner At Nova Associates, Inc.

Location:
Greater Boston Area
Industry:
Computer Hardware

Publications & IP owners

Us Patents

Load Lock Fast Pump Vent

US Patent:
2013007, Mar 28, 2013
Filed:
Sep 24, 2012
Appl. No.:
13/625704
Inventors:
BROOKS AUTOMATION, INC. - Chelmsford MA, US
Martin R. Elliot - Pepperell MA, US
Alexander Krupyshev - Chelmsford MA, US
Joseph Hallisey - Pepperell MA, US
Joseph A. Kraus - Pepperell MA, US
William Fosnight - Saratoga Springs NY, US
Craig J. Carbone - Lunenburg MA, US
Jeffrey C. Blahnik - Pepperell MA, US
Ho Yin Owen Fong - Santa Clara CA, US
Assignee:
BROOKS AUTOMATION, INC. - Chelmsford MA
International Classification:
H01L 21/67
US Classification:
414150, 414217
Abstract:
A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

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