Ken VoSoquel, CA

Ken Vo Phones & Addresses

Soquel, CA

Work

Company: Adecco - contracting for google Jun 2013 Position: Operator

Education

School / High School: UCLA- Los Angeles, CA 1991 Specialities: BS in Physics

Mentions for Ken Vo

Ken Vo resumes & CV records

Resumes

Ken Vo Photo 32

Ken Vo

Industry:
Computer Software
Work:
Lamonir
Webmaster
Ken Vo Photo 33

Clerk

Industry:
Accounting
Ken Vo Photo 34

Ken Vo

Ken Vo Photo 35

Ken Vo

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Ken Vo

Location:
United States
Ken Vo Photo 37

Ken Vo - San Jose, CA

Work:
Adecco - Contracting for Google Jun 2013 to 2000
Operator
Hitachi - San Jose, CA Jun 2008 to Apr 2013
Research Technician - Specialist
Novellus Systems Inc - San Jose, CA Apr 2001 to Jul 2006
Process Development Engineer
Education:
UCLA - Los Angeles, CA 1991 to 1997
BS in Physics

Publications & IP owners

Us Patents

Hydrogen Treatment Enhanced Gap Fill

US Patent:
7211525, May 1, 2007
Filed:
Mar 16, 2005
Appl. No.:
11/082369
Inventors:
Sunil Shanker - Sunnyvale CA, US
Sean Cox - Sunnyvale CA, US
Chi-I Lang - Sunnyvle CA, US
Judy H. Huang - Los Gatos CA, US
Minh Anh Nguyen - San Jose CA, US
Ken Vo - San Jose CA, US
Wenxian Zhu - Palo Alto CA, US
Assignee:
Novellus Systems, Inc. - San Jose CA
International Classification:
H01L 21/469
H01L 21/31
US Classification:
438788, 257E21547
Abstract:
Methods of filling gaps on semiconductor substrates with dielectric film are described. The methods reduce or eliminate sidewall deposition and top-hat formation. The methods also reduce or eliminate the need for etch steps during dielectric film deposition. The methods include treating a semiconductor substrate with a hydrogen plasma before depositing dielectric film on the substrate. In some embodiments, the hydrogen treatment is used is conjunction with a high rate deposition process.

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