Leonid V Velikov, Age 791371 Greenbrier Rd, San Carlos, CA 94070

6801044, Oct 5, 2004

Sep 5, 2003

10/654759

Boris Kesil - San Jose CA, 95124
Leonid Velikov - San Carlos CA, 94070
Yuri Vorobyev - San Carlos CA, 94070

G01R 2726

324663, 324662

A universal electromagnetic resonance system is aimed at detecting and measuring local non-uniformities in objects made from conductive or non-conductive materials. The system comprises a composite measuring unit composed of two identical and symmetrically arranged individual oscillation circuits with measurement elements in the form of identical and symmetrically arranged inductive coils or capacitor chips. The unit is connected to an impedance analyzer for supplying RF current and for measuring the voltage signal in the oscillation circuit. Since all the elements of individual oscillation circuits are identical, in the case of non-uniformity of the object on the scanned area, the parameters of the resonance will hanged. This change will violate the symmetry in the operation of the individual oscillation circuits. The variation in measured signal can be calibrated in terms of the target parameter or characteristic of the object.

6815958, Nov 9, 2004

Feb 7, 2003

10/359378

Boris Kesil - San Jose CA
Leonid Velikov - San Carlos CA
Yuri Vorobyev - San Carlos CA

Multimetrixs, LLC - Santa Clara CA

G01R 2726

324662, 324663

The invention relates to an apparatus and method for measuring thickness and deviations from the thickness of very thin conductive coatings on various non-conductive substrates, or of very thin non-conductive coatings on conductive substrates. The apparatus consists of an inductive coil having specific parameters, an external AC generator operating on frequencies, e. g. , from 50 MHz to 2. 5 GHz, preferably from 100 MHz to 200 MHz, and a measuring instrument, such as an oscilloscope, voltmeter, etc. for measuring output of the sensor. The coil has miniature dimensions. The invention is based on the principle that inductive coil of the sensor, active resistance of the coil winding, inherent capacitance of the inductive coil (or a separate capacitor built into the sensors circuit), and the aforementioned AC generator form a parallel oscillating circuit. The apparatus operates on very high resonance frequencies, preferably within the range of 100 to 200 MHz, at which a capacitive coupling is established between the coil of the oscillating circuit and the thin films being measured. By measuring the parameters of the resonance oscillating circuit, it becomes possible to measure film thickness below 500 Angstroms.

6842025, Jan 11, 2005

Oct 29, 2003

10/695173

Elik Gershenzon - Daly City CA, US
Boris Kesil - San Jose CA, US
Leonid Velikov - San Carlos CA, US
Yuri Vorobyev - San Carlos CA, US

MultiMetrixs L.L.C. - Santa Clara CA

G01R 3102
G01N 2100

324759, 356 73

An apparatus of the invention is intended for multiple identical continuous records of characteristics on the surface of an object, e. g. , a semiconductor wafer, after selected stages of manufacture and treatment. The apparatus is provided with a rotary table for rotation of the wafer with a mechanism for installing the wafer in a predetermined initial position for starting measurements from the same point after each selected stage of manufacture or treatment. The measurements are synchronized for all sequential manufacturing stages of the wafer and are carried out with the use of a resonance sensor based on the principles of resonance sensor technology. The recorded information is stored on a memory device, and if the final product has a defect or deviations, the stored information can be easily retrieved for revealing the time, place on the product, and the source of the defect. The same records can also be used for correlation between the defects or deviations and the failure of the final product on quality control and even during exploitation of the chip in a semiconductor device.

6891380, May 10, 2005

Jun 2, 2003

10/449892

Boris Kesil - San Jose CA, US
Leonid Velikov - San Carlos CA, US
Yuri Vorobyev - San Carlos CA, US

MultiMetrixs, LLC - Santa Clara CA

G01R027/04
G01R033/12
G01B007/06

324635, 324633, 324230

The system of the invention for measuring characteristics of thin conductive and non-conductive material, such as bulk material or films, is based on the use of a resonance oscillating circuit that incorporates at least two components selected from the group consisting of an inductive coil and a capacitor, which in combination form a sensor that could be approached close to the surface to be measured. The measurement of the film or material characteristics, such as film resistance (film thickness) or a dielectric constant (film thickness) of a non-conductive material, is based on the principle that the sensor is approached to the measured surface at a distance, at which the inductance and capacitance of the sensor generate in the measured material a virtual coil and an additional capacitance, which strongly depend on the characteristics of the measured material. As the sensor approached towards the surface to be measured, the sensor-material system generates a series of resonances having different values of power. One of these resonances can be defined as the so-called full resonance, which is characterized by the maximum value of the power, and hence provides the most accurate measurement and can be used for precisely determining the measurement distance.

6939058, Sep 6, 2005

Feb 12, 2002

10/074346

Igor Gurevich - Saarbrucken, DE
Victor Faibishenko - Union City CA, US
Shinkyo Kaku - San Jose CA, US
Leonid Velikov - San Carlos CA, US

MicroAlign Technologies, Inc. - San Carlos CA
Allied Telesyn International Corp. - Bothell WA

G02B006/36

385 93, 385 92, 385 88

The optical module of the invention for high-speed bidirectional transceiver consists of a signal receiving unit, a signal transmitting unit, a common receiving-transmitting optical fiber, and a fiber coupling unit. The laser diode and the photodiode are arranged parallel to each other in closely located recesses of the module housing. Such an arrangement makes it possible to shorten distances for guiding lead wires from the terminals of the PC board to the respective terminals of the transmitting and receiving diodes. The laser diode emits a first transmitting laser beam that passes through a microobjective that collimates the beam and directs into onto a full-reflection mirror located inside the module housing. The full-reflection mirror reflects the first transmitting beam at an angle of 90 and transmits it to the end face of an optical fiber through an optical fiber collimator that centers the beam with the fiber core. The module is provided with a second mirror, which is fully transparent to the aforementioned first transmitting beam, but is fully reflective to a second transmitting beam that may propagate in a direction opposite to the first transmitting beam on a different wavelength.

6980379, Dec 27, 2005

Jul 19, 2004

10/893860

Igor Gurevich - Saarbrucken, DE
Victor Faybishenko - Union City CA, US
Leonid Velikov - San Carlos CA, US

Microalign Technologies, Inc. - San Carlos CA

G02B009/00
G02B013/04
G02B009/60

359754, 359753, 359770

A flat wide-angle objective of the invention consists of a first sub-unit that is located on the object side of the objective and includes an assembly of two conventional aspheric negative, plano-concave lenses, and a second sub-unit in the form of a set of four microlens arrays arranged on the image-receiving side of the objective. The microlenses of all microlens arrays have the same arrangement of microlenses in all the arrays. A diaphragm array with restricting openings can be sandwiched between a pair of the microlens arrays. The invention makes it possible to reduce longitudinal dimension of the objective. In operation, the first sub-unit creates an imaginary image of the object in its focal plane, which is located on object side of the objective, while the second sub-unit creates an actual image of the object in the image plane on the image-receiving side of the objective.

6989675, Jan 24, 2006

Mar 13, 2003

10/386648

Boris Kesil - San Jose CA, US
Leonid Velikov - San Carlos CA, US
Yuri Vorobyev - San Carlos CA, US

MultiMetrixs LLC - Santa Clara CA

G01R 27/32

324636, 324644

An apparatus for measuring thickness in super-thin films consists of a special resonator unit in the form of an open-bottom cylinder which is connected to a microwave swept frequency microwave source via a decoupler and a matching unit installed in a waveguide that connects the resonator unit with the microwave source. The apparatus operates on the principle that thin metal film F, the thickness of which is to be measured, does not contact the end face of the open bottom of the cylindrical resonator sensor unit and functions as a bottom of the cylindrical body. The design of the resonator excludes generation of modes other than the resonance mode and provides the highest possible Q-factor. As the conductivity directly related to the film thickness, it is understood that measurement of the film thickness is reduced to measurement of the resonance peak amplitudes. This means that superhigh accuracy inherent in measurement of the resonance peaks is directly applicable to the measurement of the film thickness or film thickness deviations.

7106529, Sep 12, 2006

Aug 24, 2004

10/862178

Igor Gurevich - Saarbrucken, DE
Victor Faybishenko - San Carlos CA, US
Leonid Velikov - San Carlos CA, US

Microalign Technologies, Inc. - San Carlos CA

G02B 13/04
G02B 27/10

359749, 359622

A flat wide-angle lens system of the invention has a reduced axial length and is intended for creating images with extremely wide angle of observation. The system consists of the first component which is intended for reduction of the field angle of light incidence onto the objective and comprises an assembly of at least two microlens arrays with the same pitch between the adjacent microlenses and arranged with respect to each other so as to provide afocality, and a second component that comprises an assembly of conventional spherical or aspherical microlenses that create an image on an image receiver. Each two coaxial microlenses of the microlens arrays of the first component form an inverted microtelescope of Galileo. The outlet aperture of a single microtelescope is made so that spherical aberration can be minimized almost to 0, while field aberrations can be corrected by design parameters of the microlenses.