Inventors:
Ronald Richard Breton - Richmond VT, US
S. Jay Chey - Ossining NY, US
Steven Alan Cordes - Yorktown Heights NY, US
Matthew Farinelli - Riverdale NY, US
Michael David Fregeau - Colchester VT, US
Sherif Ahmed Goma - White Plains NY, US
Gene T. Patrick - Richmond VT, US
Mohammed S. Shaikh - Essex Junction VT, US
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
G01R 31/02
Abstract:
An apparatus for testing integrated circuit devices includes a probe device having a plurality of probes, a first substrate including a product substrate having a first surface and an array of electrical contacts disposed on the first surface thereof, and a second substrate disposed between the probes and the first substrate for electrically coupling the probes to corresponding electrical contacts disposed on the first surface of the product substrate.