Michael Kundracik10480 Stokes Ave, Cupertino, CA 95014
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10480 Stokes Ave, Cupertino, CA 95014 (408) 255-2374
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Us Patents
Wafer Carrier Checker And Method Of Using Same
US Patent:
2006025, Nov 9, 2006
Filed:
May 4, 2005
Appl. No.:
11/121367
Inventors:
Michael Kundracik - Boulder Creek CA, US
International Classification:
B24B 49/00
B24B 7/30
B24B 1/00
B24B 7/30
B24B 1/00
US Classification:
451008000, 451041000
Abstract:
A tool and method for assessing whether a disk carrier, and especially a carrier for holding semiconductor disks, is properly dimensioned. The tool has a body that includes a socket in which a portion of the disk carrier will seat fully if the disk carrier is properly dimensioned. Alignment structures may be provided in the socket to align with features of the carrier to assist in determining whether the disk carrier is properly dimensioned. The socket may include two spaced apart cavities that correspond with end portions of walls of the disk carrier.
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