Michael John Mcgranaghan, Age 562916 SW 140Th St, Oklahoma City, OK 73170

Michael Mcgranaghan Phones & Addresses

Oklahoma City, OK

18017 Masi Loop, Pflugerville, TX 78660 (214) 356-8263

Austin, TX

9350 Skillman St, Dallas, TX 75243 (214) 340-2051

Tyler, TX

Houston, TX

Shawnee Mission, KS

Rochester, NY

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Publications & IP owners

Us Patents

Shallow Trench Isolation Planarization Using Self Aligned Isotropic Etch

US Patent:
6686283, Feb 3, 2004
Filed:
Feb 4, 2000
Appl. No.:
09/498083
Inventors:
Shawn T. Walsh - Richardson TX
John E. Campbell - Plano TX
Somit Joshi - Dallas TX
James B. Friedmann - Dallas TX
Michael J. McGranaghan - Dallas TX
Janice D. Makos - McKinney TX
Arun Sivasothy - Dallas TX
Troy A. Yocum - Plano TX
Jaideep Mavoori - Richardson TX
Wayne A. Bather - Plano TX
Joe G. Tran - Irving TX
Michelle L. Hartsell - Plano TX
Gregory B. Shinn - Dallas TX
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
H01L 2176
US Classification:
438690, 438691, 438692
Abstract:
A method for forming planar isolation structures for integrated circuits. A etch barrier is formed over the isolation fill material and an etch back is performed to remove material above unetched portions of the substrate. The exposed fill material is etched and planarized to form a planar isolation structure.

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