Inventors:
John F. Arackaparambil - San Carlos CA, US
Tom Chi - San Jose CA, US
Billy Chow - Menlo Park CA, US
Patrick M. D'Souza - Mountain View CA, US
Parris Hawkins - Pleasanton CA, US
Charles Huang - Union City CA, US
Jett Jensen - Campbell CA, US
Badri N. Krishnamurthy - Mountain View CA, US
Pradeep M. Kulkarni - Sunnyvale CA, US
Prakash M. Kulkarni - Sunnyvale CA, US
Wen Fong Lin - San Jose CA, US
Shantha Mohan - Palo Alto CA, US
Bishnu Nandy - Union City CA, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
G06F 19/00
Abstract:
The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle () having lifecycle activities for SW developing and integrating (), installing and administrating (), factory modeling (), manufacturing planning (), manufacturing controlling, monitoring and tracking () and analyzing of manufacturing results (). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and software building blocks. The framework components are adapted for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.
