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Ronald Andres
Ronald Andres
Ronald Andres
Ronald C Andres, Age 499 Glenn Ln, Jersey City, NJ 07305
Ronald Andres Phones & Addresses
Jersey City, NJ
Ridgefield Park, NJ
New York, NY
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Us Patents
Nozzle Beam Type Metal Vapor Source
US Patent:
4125086, Nov 14, 1978
Filed:
Jan 6, 1977
Appl. No.:
5/757261
Inventors:
John R. Vig - Colts Neck NJ
Erich Hafner - Tinton Falls NJ
Ronald P. Andres - Princeton NJ
Erich Hafner - Tinton Falls NJ
Ronald P. Andres - Princeton NJ
Assignee:
The United States of America as represented by the Secretary of the Army - Washington DC
International Classification:
C23C 1308
US Classification:
118 491
Abstract:
A novel, high-flux source for use in the vapor deposition of electrode maials, such as gold, during the fabrication of precision quartz-crystal resonators, or the like. The design is based on the theory and technology of nozzle beams. The nozzle beam type source disclosed herein is conceived: (1) to permit large deposition rates with minimum wastage of electrode material; (2) to operate in high vacuum; (3) to emit vapor in a horizontal direction, thereby permitting the use of a pair of sources to plate both sides of a substrate simultaneously; and (4) to operate for extended periods of time without requiring frequent breaking of the vacuum in order to replenish the source. It is estimated that this design can operate at a deposition rate equal or above that of a conventional evaporation-type source with less than one percent of the wastage of electrode material experienced with a conventional source.
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