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Steven A Bumgardner, Age 822201 Lone Oak Way, Prescott, AZ 86305

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Known as:
Steven Arthur Bumgardner Steven J Bumgardner Steven A Bumgarder Sherry A Bumgardner Steven Wangemann Steven A Dreher Steve Bumgardner
Related to:
Rosa Maria Machado 60

Steven Bumgardner Phones & Addresses

2201 Lone Oak Way, Prescott, AZ 86305

Prescott Valley, AZ

Scotts Valley, CA

6979 Sessions Dr, San Jose, CA 95119

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Us Patents

Wafer-Mapping Load Post Interface Having An Effector Position Sensing Device

US Patent:
6013920, Jan 11, 2000
Filed:
Nov 25, 1998
Appl. No.:
9/199931
Inventors:
Jeffrey M. Gordon - Sunnyvale CA
Cyril M. Kindt - Sunnyvale CA
Kenneth A. Hardy - San Jose CA
Steven A. Bumgardner - San Jose CA
William E. Wegener - Union City CA
Eric Meyhofer - Palo Alto CA
Assignee:
Fortrend Engineering Coirporation - Sunnyvale CA
International Classification:
G01N 2186
US Classification:
25055936
Abstract:
A load port interface (20) receives, opens and closes a wafer carrier (22). A bulkhead (24) carries a changeable mating plate (92) that is pierced by a window (94). Changing the mating plate (92) adapts the load port interface (20) for use with different sizes of carriers(22). A table (32) of the load port interface (20) receives the carrier (22), advances the carrier (22) until it abuts and seals to the bulkhead (24). An end-effector (42), located on an opposite side of the bulkhead (24) from the carrier (22), actuates latch keys (54) to unlatch a door (48) from the carrier (22). The load port interface (20) then moves the unlatched door (48) rectilinearly, first horizontally away from the bulkhead (24) and then vertically downward, to expose semiconductor wafers (48) present within the carrier (22). The end-effector (42) includes sensors (86, 104) for collecting data about wafers (82) within the carrier (22) by detecting edges (118) thereof. This data is analyzed to determine the arrangement of wafers (82) within the carrier (22).

Possible Relatives

Debra L Bumgardner  Daniel B Bumgardner  Delbert Bumgardner  Donna C Bumgardner  Elizabeth F Bumgardner  Eric S Bumgardner  Eugene C Bumgardner  Steven J Last  Steven M Johnson  Steven S Stamps 

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