Inventors:
Steven D. Theiss - Woodbury MN
Paul F. Baude - Maplewood MN
Michael A. Haase - Saint Paul MN
Silva K. Theiss - Woodbury MN
Assignee:
3M Innovative Properties - St. Paul MN
International Classification:
H01L 21336
US Classification:
438299, 438674, 438679, 438622, 438623, 438943, 438944, 438578, 438586, 438300, 438681, 438166, 438149, 438164, 313402, 382283, 216 12, 356310
Abstract:
A method for making transistors comprises depositing source electrode and drain electrode features onto a substrate through a single aperture in a stationary shadow mask, said aperture having at least two opposing edges; wherein the shapes of the features are defined by the aperture and location of source materials in relation to the substrate.