Tamara M Byrne, Age 4673 Schoonmaker Rd, Glenmont, NY 12077

Tamara Byrne Phones & Addresses

Glenmont, NY

North Andover, MA

San Jose, CA

Gardiner, NY

Poughkeepsie, NY

Wappingers Falls, NY

Hopewell Jct, NY

Anchorage, AK

Greeley, CO

1842 Camino Leonor, San Jose, CA 95131

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Tamara M Byrne

Linkedin

Work

Company: Mks instruments - umetrics Jul 2008 Address: San Jose, CA Position: Application manager

Education

School / High School: State University of New York at New Paltz 2005 to 2007

Skills

Multivariate Analysis • Data Mining • SIMCA • SIMCA-online • MODDE • Semiconductors • System Architecture • Design of Experiments • Project Management • Testing • Process Engineering

Industries

Computer Software

Mentions for Tamara M Byrne

Tamara Byrne resumes & CV records

Resumes

Tamara Byrne Photo 34

Application Manager At Umetrics - An Mks Company

Position:
Application Manager at MKS Instruments - Umetrics
Location:
San Jose, California
Industry:
Computer Software
Work:
MKS Instruments - Umetrics - San Jose, CA since Jul 2008
Application Manager
MKS Instruments Jan 2008 - Jul 2008
Senior Application Specialist
IBM, Systems & Technology Group Mar 2003 - Jan 2008
Staff Software Engineer for process monitoring solutions
IBM Nov 2001 - Mar 2003
Team Lead for closed loop control and process monitoring solutions
IBM Jul 2000 - Nov 2001
Senior Associate Software Engineer for closed loop control
Education:
State University of New York at New Paltz 2005 - 2007
University of Northern Colorado 1996 - 2000
Skills:
Multivariate Analysis, Data Mining, SIMCA, SIMCA-online, MODDE, Semiconductors, System Architecture, Design of Experiments, Project Management, Testing, Process Engineering

Publications & IP owners

Us Patents

Process Control Using Process Data And Yield Data

US Patent:
8271122, Sep 18, 2012
Filed:
Jul 22, 2011
Appl. No.:
13/189280
Inventors:
Tamara Byrne - San Jose CA, US
Lennart Eriksson - Umea, SE
Svante Bjarne Wold - Hollis NH, US
Assignee:
MKS Instruments, Inc. - Andover MA
International Classification:
G06F 19/00
US Classification:
700121
Abstract:
A method for monitoring a manufacturing tool features acquiring metrology data (“Step a”). Data is acquired for process variables for a first process step performed by the manufacturing tool (“Step b”). A mathematical model of the first process step based on the metrology data and the acquired data is created (“Step c”). Steps b and c are repeated for at least a second process step (“Step d”). An nth mathematical model is created based on the metrology data and the data for the process variables for each of the n process steps (“Step e”). A top level mathematical model is created based on the metrology data and the models created by steps c, d and e (“Step f”). A multivariate metric is calculated based on the top level model of step f and data from subsequent runs of the manufacturing tool. Service is performed if the metric satisfies a condition.

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