Inventors:
KEVIN K. CHAN - Staten Island NY, US
Jack O. Chu - Manhasset Hills NY, US
Jin-Ping Han - Fishkill NY, US
Thomas S. Kanarsky - Hopewell Junction NY, US
Hung Y. Ng - New Milford NJ, US
Qiqing Quyang - Yorktown Heights NY, US
Gen Pei - Mahopac NY, US
Chun-Yung Sung - Poughkeepsie NY, US
Henry K. Utomo - Newburgh NY, US
Thomas A. Wallner - Pleasant Valley NY, US
International Classification:
H01L 29/78
H01L 21/336
US Classification:
257351, 438163, 438154, 257E29295, 257E21409
Abstract:
In one embodiment, the invention is a complementary metal-oxide-semiconductor device with an embedded stressor. One embodiment of a field effect transistor includes a silicon on insulator channel, a gate electrode coupled to the silicon on insulator channel, and a stressor embedded in the silicon on insulator channel and spaced laterally from the gate electrode, where the stressor is formed of a silicon germanide alloy whose germanium content gradually increases in one direction.