Travis Savage resumes & CV records
Resumes
Travis Savage
Travis J Savage, Age 398079 S Angel St, Sandy, UT 84070
Travis Savage Phones & Addresses
8079 S Angel St, Sandy, UT 84070
Cottonwood Heights, UT
Aztec, NM
Farmington, NM
Albuquerque, NM
Kirtland, NM
Salt Lake City, UT
Mentions for Travis J Savage
Publications & IP owners
Us Patents
Compositions Of Low-K Dielectric Sols Containing Nonmetallic Catalysts
US Patent:
2014012, May 1, 2014
Filed:
Oct 31, 2013
Appl. No.:
14/069352
Inventors:
- Albuquerque NM, US
Travis Savage - Albuquerque NM, US
Travis Savage - Albuquerque NM, US
International Classification:
H01L 21/02
US Classification:
438778, 521 86
Abstract:
A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
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