Travis T Tesch, Age 45Santa Clara, CA

Travis Tesch Phones & Addresses

Santa Clara, CA

1050 Diamond St, San Diego, CA 92109

255 King St, San Francisco, CA 94107 (415) 495-2704

Campbell, CA

San Jose, CA

La Jolla, CA

Watertown, SD

Philadelphia, PA

Middletown, RI

Newport, RI

Ithaca, NY

Morristown, NJ

255 King St, San Francisco, CA 94107 (415) 640-7070

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Position: Executive, Administrative, and Managerial Occupations

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Degree: High school graduate or higher

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Travis Tesch

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Us Patents

Methods For Determining The Quantity Of Precursor In An Ampoule

US Patent:
2010030, Dec 2, 2010
Filed:
May 17, 2010
Appl. No.:
12/781353
Inventors:
Joseph Yudovsky - Campbell CA,
Jeffrey Tobin - Mountain View CA,
Patricia M. Liu - Saratoga CA,
Faruk Gungor - San Jose CA,
Tai T. Ngo - Dublin CA,
Travis Tesch - Santa Clara CA,
Kenric Choi - Santa Clara CA,
Assignee:
APPLIED MATERIALS, INC. - Santa Clara CA
International Classification:
G01N 7/00
US Classification:
702 50, 73 3104
Abstract:
Methods of determining an amount of precursor in an ampoule have been provided herein. In some embodiments, a method for determining an amount of solid precursor in an ampoule may include determining a first pressure in an ampoule having a first volume partially filled with a solid precursor; flowing an amount of a first gas into the ampoule to establish a second pressure in the ampoule; determining a remaining portion of the first volume based on a relationship between the first pressure, the second pressure, and the amount of the first gas flowed into the ampoule; and determining the amount of solid precursor in the ampoule based on the first volume and the remaining portion of the first volume.

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