William G Turnbull, Age 6142501 Highway 101, Laytonville, CA 95454

4818872, Apr 4, 1989

May 11, 1987

7/049736

Norman W. Parker - Westlake Village CA
William G. Turnbull - Newbury Park CA
William P. Robinson - Newbury Park CA

Microbeam Inc. - Newbury Park CA

H01J 3726

250309

An integrated charge neutralization and imaging system is disclosed. An energy analyzer is mounted directed above a target surface consisting of a 90 degree spherical electrostatic capacitor with variable voltage on both the inner and outer electrodes. Circular apertures are mounted at the entrance and exit of the analyzer to limit the fringing electric fields and define the beam size. An electrostatic lenses is used for focusing the beam from the electron gun into the virtual object plane of the energy analyzer. It is also used to collect secondary electrons or secondary ions leaving the energy analyzer and focused them into the imaging optics. A defector is used for steering the electron beam onto the axis of the lens. This deflector is also used to steer the secondary electrons or secondary ions into the electron/ion detector, or to steer the secondary ions into the SIMS mass filter entrance aperture. An electrons gun is used for providing a beam of electrons which is aimed towards the deflector, and then on through the lens and energy analyzer, finally ending up at the target surface.