Alexander Kagan resumes & CV records
Resumes
Alexander Kagan, Age 78518 Tarter Ct, San Jose, CA 95136
Alexander Kagan Phones & Addresses
518 Tarter Ct, San Jose, CA 95136 (408) 265-7051
Santa Clara, CA
518 Tarter Ct, San Jose, CA 95136
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Alexander Kagan
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Work
Position:
Professional/Technical
Education
Degree:
Associate degree or higher
Mentions for Alexander Kagan
Publications & IP owners
Us Patents
Systems And Methods For Controlling Deposition Of A Charge On A Wafer For Measurement Of One Or More Electrical Properties Of The Wafer
US Patent:
2007006, Mar 29, 2007
Filed:
Aug 21, 2006
Appl. No.:
11/465893
Inventors:
Jeffrey Rzepiela - Sunnyvale CA, US
Yiping Feng - Cupertino CA, US
Shiyou Pei - Saratoga CA, US
Alexander Kagan - San Jose CA, US
Jianou Shi - Milpitas CA, US
Sergio Edelstein - Los Gatos CA, US
Yiping Feng - Cupertino CA, US
Shiyou Pei - Saratoga CA, US
Alexander Kagan - San Jose CA, US
Jianou Shi - Milpitas CA, US
Sergio Edelstein - Los Gatos CA, US
Assignee:
KLA-TENCOR TECHNOLOGIES CORP. - Milpitas CA
International Classification:
G01R 31/26
US Classification:
324765000
Abstract:
Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer are provided. One system includes a corona source configured to deposit the charge on the wafer and a sensor configured to measure one or more conditions within the corona source. This system also includes a control subsystem configured to alter one or more parameters of the corona source based on the one or more conditions. Another system includes a corona source configured to deposit the charge on the wafer and a mixture of gases disposed within a discharge chamber of the corona source during the deposition of the charge. The mixture of gases alters one or more parameters of the charge deposited on the wafer.
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