Career records & work history
License Records
Bok Jin Kim
Licenses:
License #: 2705081707
Category: Contractor
Category: Contractor
Bok H Kim, Age 71Norcross, GA
Bok Kim Phones & Addresses
Norcross, GA
Sandy Springs, GA
Los Angeles, CA
Athens, GA
Stone Mountain, GA
Work
Company:
Nature and health company
Address:
451 W Lambert Rd Ste 200, Brea, CA 92821
Phones:
(714) 256-2131
Position:
Coo
Industries:
Food Preparations
Mentions for Bok H Kim
Bok Kim resumes & CV records
Resumes
Bok Kim
Location:
United States
Bok Kim
Location:
United States
Bok Kim
Location:
United States
Bok Kim
Publications & IP owners
Us Patents
Nitrogen Doped Amorphous Carbon Hardmask
US Patent:
2014037, Dec 18, 2014
Filed:
Jun 18, 2013
Appl. No.:
13/920944
Inventors:
- Santa Clara CA, US
Jacob JANZEN - Pasadena CA, US
Deenesh PADHI - Sunnyvale CA, US
Bok Hoen KIM - San Jose CA, US
Jacob JANZEN - Pasadena CA, US
Deenesh PADHI - Sunnyvale CA, US
Bok Hoen KIM - San Jose CA, US
Assignee:
APPLIED MATERIALS, INC. - Santa Clara CA
International Classification:
H01L 21/027
H01L 21/3065
H01L 21/3065
US Classification:
438702, 438781
Abstract:
Embodiments described herein generally relate to the fabrication of integrated circuits and more particularly to nitrogen doped amorphous carbon layers and processes for depositing nitrogen doped amorphous carbon layers on a semiconductor substrate. In one embodiment, a method of forming a nitrogen doped amorphous carbon layer on a substrate is provided. The method comprises positioning a substrate in a substrate processing chamber, introducing a nitrogen containing hydrocarbon source into the processing chamber, introducing a hydrocarbon source into the processing chamber, introducing a plasma-initiating gas into the processing chamber, generating a plasma in the processing chamber, and forming a nitrogen doped amorphous carbon layer on the substrate.
Possible Relatives
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