John M Legare, Age 69206 Wakefield Ct, Hockessin, DE 19707

5696189, Dec 9, 1997

Dec 1, 1995

8/566235

John Michael Legare - Newark DE

E. I. Du Pont de Nemours and Company - Wilmington DE

C08K 520

524232

Perfluoroelastomer compositions substantially free of elemental carbon, having selected metallic reinforcing filler and titanium dioxide, when cured, exhibit excellent performance characteristics in dry process semiconductor sealing applications.

6328316, Dec 11, 2001

Jan 11, 2000

9/481320

Shuzo Fukuhara - Newark DE
John Michael Legare - San Ramon CA

DuPont Dow Elastomers, L.L.C. - Wilmington DE

F16J 1502

277644

This invention is directed to a seal for installation into an annular groove of dovetail configuration that has a mouth, two side walls depending from the mouth that extend away from each other and a base wall that is connected to the two side walls thereby forming the dovetail configuration. The seal of this invention viewed in cross section comprises an element having a multi-arcual surface and a substantially flat surface, the multi-arcual surface has distinct first, second and third convex arcual surfaces; the first convex arcual surface of the seal is sized and shaped for positioning in the mouth of the annular groove of the dovetail configuration and is directly connected to the substantially flat surface; the substantially flat surface is directly connected to the second arcual convex surface that is in turn directly connected to a first concave arcual surface that is directly connected to the third convex arcual surface; the second and third convex arcual surfaces being shaped and sized so as to be in contact with the base wall of the annular groove of the dovetail configuration when the seal is seated in the groove; the third convex arcual surface and the first arcual convex surface are directly connected by a second concave arcual surface and the region defined by this second concave arcual surface forms an insertion surface of approximate complementary shape to the mouth of the annular groove for mating engagement with the side walls of the annular groove during insertion of the seal into the groove.

H17361, Jun 2, 1998

Sep 27, 1996

8/720338

John Michael Legare - Newark DE
Eric William Thomas - Hudson OH

E. I. du Pont de Nemours and Company - Wilmington DE

C08F11420

525194

Fluoroelastomer compositions with minimal concentrations of extractable metal species exhibit excellent performance characteristics under conditions requiring exceptional purity.

5986012, Nov 16, 1999

Feb 12, 1993

8/016644

John Michael Legare - Newark DE
Anestis Leonidas Logothetis - Wilmington DE

E. I. du Pont de Nemours and Company - Wilmington DE

C08F 1426
C08F 1418
C08F 822
C08C 1914

5253262

This invention concerns a process for fluorinating a perfluoroelastomer which has previously been crosslinked by exposure to ionizing radiation. The resulting product has reduced outgassing. This makes perfluoroelastomer parts that have undergone the process particularly useful in clean rooms and for semiconductor manufacturing.

5168001, Dec 1, 1992

May 20, 1991

7/703220

John M. Legare - Newark DE
Anestis L. Logothetis - Wilmington DE
Duck J. Yang - Wilmington DE

E. I. Du Pont de Nemours and Company - Wilmington DE

B32B 300

428194

Pellicles having films bearing at least one coating of perfluoropolymers as an antireflective surface, the perfluoropolymers comprising a low molecular weight perfluoropolymer having randomly copolymerized units of tetrafluoroethylene, perfluoro (alkyl vinyl) ether and a cure site monomer, the cure site monomer selected from the group consisting of vinylidene fluoride, perfluoro-(8-cyano-5-methyl-3,6-dioxa-1-octene), bromotetrafluorobutene or perfluoro (2-phenoxypropyl vinyl ether). Pellicles of this type are dust defocusing covers for photomasks and reticles used to project patterns onto light sensitive substrates such as photoresist-coated semiconductor wafers which are used in the manufacture of integrated circuits.